The transport of sputtered aluminum inside a multi frequency capacitivelycoupled plasma chamber is simulated by means of a kinetic test multi-particleapproach. A novel consistent set of scattering parameters obtained for amodified variable hard sphere collision model is presented for both argon andaluminum. An angular dependent Thompson energy distribution is fitted toresults from Monte Carlo simulations and used for the kinetic simulation of thetransport of sputtered aluminum. For the proposed configuration the transportof sputtered particles is characterized under typical process conditions at agas pressure of p=0.5 Pa. It is found that -- due to the peculiar geometricconditions -- the transport can be understood in a one dimensional picture,governed by the interaction of the imposed and backscattered particle fluxes.It is shown that the precise geometric features play an important role only inproximity to the electrode edges, where the effect of backscattering from theoutside chamber volume becomes the governing mechanism.
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